Equipment usage: Used for processes such as oxidation, diffusion, sintering, and alloying in industries such as large-scale integrated circuits, power electronics, optoelectronic devices, and optical fibers.
Equipment features: Unit combination method. According to different processes, air source cabinets, ultra clean workbenches, cantilever push-pull boats, etc. can be equipped on the basis of the host.
Main technical indicators:
★ Number of furnace tubes: 1-4 tubes
★ Process pipe diameter: Φ 90-360 mm (3-12 inches)
★ Constant temperature zone length: 760-1000 mm ± 1.0 ℃ (300-800 ℃) 760-1000 mm ± 0.5 ℃ (800-1280 ℃)
★ Single point stability: ± 1.0 ℃/24h (300-800 ℃) ± 0.5 ℃/24h (800-1280 ℃)
★ Number of gas sources: ≤ 7, can be equipped with constant temperature source bottle, hydrogen oxygen synthesis igniter
★ Gas Control: Float/Mass Flow Meter
★ Cantilever boat parameters: speed: 20-1000 mm/min maximum stroke: 2000 mm positioning accuracy: ± 1 mm maximum load: 17 Kg
★ Ultra clean workbench: Purification level: 100 level (10000 level factory building)
Noise: ≤ 62dB (A)
Vibration: ≤ 3 μ m
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