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Wafer vacuum annealing furnace

Launch Time:2024-07-16
View Count:43
Product Type:退火炉
Product Color:
Product Price:¥
Product Info

The wafer vacuum annealing furnace is mainly used for low-temperature annealing of semiconductor wafers.

Size: 4-8 inch wafer

Wafer Boat: Standard

Temperature control accuracy: ± 3 ℃

Heating rate: 10 ℃/min

Cleanliness level: Class 1000 cleanliness


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